Simulation of X-Ray Resist Line Edge Profiles

A.R. Neureuther

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M77/43
June 1977

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1977/ERL-m-77-43.pdf

BibTeX citation:

@techreport{Neureuther:M77/43,
    Author = {Neureuther, A.R.},
    Title = {Simulation of X-Ray Resist Line Edge Profiles},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1977},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1977/28896.html},
    Number = {UCB/ERL M77/43}
}

EndNote citation:

%0 Report
%A Neureuther, A.R.
%T Simulation of X-Ray Resist Line Edge Profiles
%I EECS Department, University of California, Berkeley
%D 1977
%@ UCB/ERL M77/43
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1977/28896.html
%F Neureuther:M77/43