Simulation of Optically Formed Image Profiles in Positive Photoresist

Michael M. O'Toole

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M79/42
June 1979

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1979/ERL-m-79-42.pdf

Advisor: Andrew R. Neureuther

BibTeX citation:

@phdthesis{O'Toole:M79/42,
    Author = {O'Toole, Michael M.},
    Title = {Simulation of Optically Formed Image Profiles in Positive Photoresist},
    School = {EECS Department, University of California, Berkeley},
    Year = {1979},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1979/8365.html},
    Number = {UCB/ERL M79/42}
}

EndNote citation:

%0 Thesis
%A O'Toole, Michael M.
%T Simulation of Optically Formed Image Profiles in Positive Photoresist
%I EECS Department, University of California, Berkeley
%D 1979
%@ UCB/ERL M79/42
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1979/8365.html
%F O'Toole:M79/42