Deok J. Kim
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M84/65
August 1984
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/ERL-m-84-65.pdf
Advisor: William G. Oldham
BibTeX citation:
@phdthesis{Kim:M84/65, Author = {Kim, Deok J.}, Title = {Characterization and Modeling of Positive Photoresist}, School = {EECS Department, University of California, Berkeley}, Year = {1984}, Month = {Aug}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html}, Number = {UCB/ERL M84/65} }
EndNote citation:
%0 Thesis %A Kim, Deok J. %T Characterization and Modeling of Positive Photoresist %I EECS Department, University of California, Berkeley %D 1984 %@ UCB/ERL M84/65 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1984/360.html %F Kim:M84/65