Finite Element Methods for Process Simulation Application to Silicon Oxidation

Pantas Sutardja

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/26
May 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-26.pdf

Advisor: William G. Oldham

BibTeX citation:

@phdthesis{Sutardja:M88/26,
    Author = {Sutardja, Pantas},
    Title = {Finite Element Methods for Process Simulation Application to Silicon Oxidation},
    School = {EECS Department, University of California, Berkeley},
    Year = {1988},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1030.html},
    Number = {UCB/ERL M88/26}
}

EndNote citation:

%0 Thesis
%A Sutardja, Pantas
%T Finite Element Methods for Process Simulation Application to Silicon Oxidation
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/26
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1030.html
%F Sutardja:M88/26