Investigation of a Focused-Image Lens-Hologram Projection System for Microlithography

Ginetto Addiego

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/89
October 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-89.pdf

Advisor: William G. Oldham

BibTeX citation:

@phdthesis{Addiego:M90/89,
    Author = {Addiego, Ginetto},
    Title = {Investigation of a Focused-Image Lens-Hologram Projection System for Microlithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {1990},
    Month = {Oct},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1600.html},
    Number = {UCB/ERL M90/89}
}

EndNote citation:

%0 Thesis
%A Addiego, Ginetto
%T Investigation of a Focused-Image Lens-Hologram Projection System for Microlithography
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/89
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1600.html
%F Addiego:M90/89