Sherry F. Lee
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/104
December 1994
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-104.pdf
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Lee:M94/104, Author = {Lee, Sherry F.}, Title = {Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals}, School = {EECS Department, University of California, Berkeley}, Year = {1994}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html}, Number = {UCB/ERL M94/104} }
EndNote citation:
%0 Thesis %A Lee, Sherry F. %T Semiconductor Equipment Analysis and Wafer State Prediction System Using Real-Time Signals %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/104 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2697.html %F Lee:M94/104