A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data

Raymond L. Chen

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/6
January 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-6.pdf

Advisor: Costas J. Spanos

BibTeX citation:

@phdthesis{Chen:M95/6,
    Author = {Chen, Raymond L.},
    Title = {A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data},
    School = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html},
    Number = {UCB/ERL M95/6}
}

EndNote citation:

%0 Thesis
%A Chen, Raymond L.
%T A Qualitative Modeling Framework of Semiconductor Manufacturing Processes: Self-Learning Fuzzy Inference System and the Statistical Analysis of Categorical Data
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/6
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2709.html
%F Chen:M95/6