Sovarong Leang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/69
August 1995
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-69.pdf
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Leang:M95/69, Author = {Leang, Sovarong}, Title = {A Control and Diagnostic System for the Photolithography Process Sequence}, School = {EECS Department, University of California, Berkeley}, Year = {1995}, Month = {Aug}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2853.html}, Number = {UCB/ERL M95/69} }
EndNote citation:
%0 Thesis %A Leang, Sovarong %T A Control and Diagnostic System for the Photolithography Process Sequence %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/69 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2853.html %F Leang:M95/69