Barry P. Linder
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M99/8
February 1999
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/ERL-99-8.pdf
Advisor: Nathan W. Cheung
BibTeX citation:
@phdthesis{Linder:M99/8, Author = {Linder, Barry P.}, Title = {Investigation of Plasma Implantation and Gate Oxide Charging During Plasma Processing}, School = {EECS Department, University of California, Berkeley}, Year = {1999}, Month = {Feb}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3579.html}, Number = {UCB/ERL M99/8} }
EndNote citation:
%0 Thesis %A Linder, Barry P. %T Investigation of Plasma Implantation and Gate Oxide Charging During Plasma Processing %I EECS Department, University of California, Berkeley %D 1999 %@ UCB/ERL M99/8 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1999/3579.html %F Linder:M99/8