Nickhil H. Jakatdar
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/11
January 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-11.pdf
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Jakatdar:M00/11, Author = {Jakatdar, Nickhil H.}, Title = {Deep Sub-Micron Photolithography Control Through In-Line Metrology}, School = {EECS Department, University of California, Berkeley}, Year = {2000}, Month = {Jan}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3817.html}, Number = {UCB/ERL M00/11} }
EndNote citation:
%0 Thesis %A Jakatdar, Nickhil H. %T Deep Sub-Micron Photolithography Control Through In-Line Metrology %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/11 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3817.html %F Jakatdar:M00/11