Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography

Nen-Wen Pu

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/19
May 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-19.pdf

Advisor: Jeffrey Bokor

BibTeX citation:

@phdthesis{Pu:M00/19,
    Author = {Pu, Nen-Wen},
    Title = {Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2000},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3833.html},
    Number = {UCB/ERL M00/19}
}

EndNote citation:

%0 Thesis
%A Pu, Nen-Wen
%T Picosecond Ultrasonic Characterization of the Molybdenum/Silicon Multilayers for Extreme Ultraviolet Lithography
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/19
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3833.html
%F Pu:M00/19