Electromagnetic Simulation and Modeling with Applications in Lithography

Thomas V. Pistor

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/19
May 2001

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-19.pdf

Advisor: Andrew R. Neureuther

BibTeX citation:

@phdthesis{Pistor:M01/19,
    Author = {Pistor, Thomas V.},
    Title = {Electromagnetic Simulation and Modeling with Applications in Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2001},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8126.html},
    Number = {UCB/ERL M01/19}
}

EndNote citation:

%0 Thesis
%A Pistor, Thomas V.
%T Electromagnetic Simulation and Modeling with Applications in Lithography
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/19
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8126.html
%F Pistor:M01/19