Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS

Yang Kyu Choi

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/38
December 2001

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-38.pdf

Advisor: Chenming Hu

BibTeX citation:

@phdthesis{Choi:M01/38,
    Author = {Choi, Yang Kyu},
    Title = {Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS},
    School = {EECS Department, University of California, Berkeley},
    Year = {2001},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html},
    Number = {UCB/ERL M01/38}
}

EndNote citation:

%0 Thesis
%A Choi, Yang Kyu
%T Nanofabrication Technologies and Novel Device Structures for Nanoscale CMOS
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/38
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/8148.html
%F Choi:M01/38