Integrated CMP Metrology and Modeling with Respect to Circuit Performance

Runzi Chang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/11
May 2004

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/ERL-04-11.pdf

Advisor: Costas J. Spanos

BibTeX citation:

@phdthesis{Chang:M04/11,
    Author = {Chang, Runzi},
    Title = {Integrated CMP Metrology and Modeling with Respect to Circuit Performance},
    School = {EECS Department, University of California, Berkeley},
    Year = {2004},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html},
    Number = {UCB/ERL M04/11}
}

EndNote citation:

%0 Thesis
%A Chang, Runzi
%T Integrated CMP Metrology and Modeling with Respect to Circuit Performance
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/11
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html
%F Chang:M04/11