Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography

Yan Wang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M05/17
May 2005

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/ERL-05-17.pdf

Advisor: Jeffrey Bokor

BibTeX citation:

@phdthesis{Wang:M05/17,
    Author = {Wang, Yan},
    Title = {Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2005},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html},
    Number = {UCB/ERL M05/17}
}

EndNote citation:

%0 Thesis
%A Wang, Yan
%T Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography
%I EECS Department, University of California, Berkeley
%D 2005
%@ UCB/ERL M05/17
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html
%F Wang:M05/17