Jing Xue
EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2009-88
May 29, 2009
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.pdf
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Xue:EECS-2009-88, Author = {Xue, Jing}, Title = {In-Situ, Portable Monitoring Methods for Photolithography Characterization}, School = {EECS Department, University of California, Berkeley}, Year = {2009}, Month = {May}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.html}, Number = {UCB/EECS-2009-88} }
EndNote citation:
%0 Thesis %A Xue, Jing %T In-Situ, Portable Monitoring Methods for Photolithography Characterization %I EECS Department, University of California, Berkeley %D 2009 %8 May 29 %@ UCB/EECS-2009-88 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.html %F Xue:EECS-2009-88