Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications
Jae Yeon (Claire) Baek
EECS Department, University of California, Berkeley
Technical Report No. UCB/EECS-2015-215
December 1, 2015
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2015/EECS-2015-215.pdf
Advisors: Costas J. Spanos
BibTeX citation:
@phdthesis{Baek:EECS-2015-215, Author= {Baek, Jae Yeon (Claire)}, Title= {Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications}, School= {EECS Department, University of California, Berkeley}, Year= {2015}, Month= {Dec}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2015/EECS-2015-215.html}, Number= {UCB/EECS-2015-215}, }
EndNote citation:
%0 Thesis %A Baek, Jae Yeon (Claire) %T Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications %I EECS Department, University of California, Berkeley %D 2015 %8 December 1 %@ UCB/EECS-2015-215 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2015/EECS-2015-215.html %F Baek:EECS-2015-215