Advanced MOSFET Structures and Processes for Sub-7 nm CMOS Technologies

Peng Zheng

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2016-189
December 1, 2016

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2016/EECS-2016-189.pdf

Advisor: Tsu-Jae King Liu


BibTeX citation:

@phdthesis{Zheng:EECS-2016-189,
    Author = {Zheng, Peng},
    Title = {Advanced MOSFET Structures and Processes for Sub-7 nm CMOS Technologies},
    School = {EECS Department, University of California, Berkeley},
    Year = {2016},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2016/EECS-2016-189.html},
    Number = {UCB/EECS-2016-189}
}

EndNote citation:

%0 Thesis
%A Zheng, Peng
%T Advanced MOSFET Structures and Processes for Sub-7 nm CMOS Technologies
%I EECS Department, University of California, Berkeley
%D 2016
%8 December 1
%@ UCB/EECS-2016-189
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2016/EECS-2016-189.html
%F Zheng:EECS-2016-189