Yi-Ching Lin

EECS Department, University of California, Berkeley

1981

Advisors: Andrew R. Neureuther

---

BibTeX citation:

@phdthesis{Lin:8378,
    Author= {Lin, Yi-Ching},
    Title= {Alignment Signals from Electrons Scattering near an Edge for Electron Beam Microfabrication},
    School= {EECS Department, University of California, Berkeley},
    Year= {1981},
}

EndNote citation:

%0 Thesis
%A Lin, Yi-Ching 
%T Alignment Signals from Electrons Scattering near an Edge for Electron Beam Microfabrication
%I EECS Department, University of California, Berkeley
%D 1981
%F Lin:8378