Integrated Silicon Electromechanical Vapor Sensor
Roger T. Howe
EECS Department, University of California, Berkeley
1984
Advisors: Richard S. Muller
BibTeX citation:
@phdthesis{Howe:7646, Author= {Howe, Roger T.}, Title= {Integrated Silicon Electromechanical Vapor Sensor}, School= {EECS Department, University of California, Berkeley}, Year= {1984}, }
EndNote citation:
%0 Thesis %A Howe, Roger T. %T Integrated Silicon Electromechanical Vapor Sensor %I EECS Department, University of California, Berkeley %D 1984 %F Howe:7646