Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/65
1987
BibTeX citation:
@techreport{Lieberman:M87/65, Author = {Lieberman, Michael A.}, Title = {Basic RF Discharge Model}, Institution = {EECS Department, University of California, Berkeley}, Year = {1987}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html}, Number = {UCB/ERL M87/65} }
EndNote citation:
%0 Report %A Lieberman, Michael A. %T Basic RF Discharge Model %I EECS Department, University of California, Berkeley %D 1987 %@ UCB/ERL M87/65 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html %F Lieberman:M87/65