Marco A. Zuniga

EECS Department, University of California, Berkeley

1999

Advisors: Andrew R. Neureuther

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BibTeX citation:

@phdthesis{Zuniga:8054,
    Author= {Zuniga, Marco A.},
    Title= {Fundamental Mechanisms in Advanced Resist Systems in Optical Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {1999},
}

EndNote citation:

%0 Thesis
%A Zuniga, Marco A. 
%T Fundamental Mechanisms in Advanced Resist Systems in Optical Lithography
%I EECS Department, University of California, Berkeley
%D 1999
%F Zuniga:8054