Electrostatic Transduction for MEMS Resonators
Sunil A. Bhave
EECS Department, University of California, Berkeley
2004
Advisors: Roger T. Howe
BibTeX citation:
@phdthesis{Bhave:8346, Author= {Bhave, Sunil A.}, Title= {Electrostatic Transduction for MEMS Resonators}, School= {EECS Department, University of California, Berkeley}, Year= {2004}, }
EndNote citation:
%0 Thesis %A Bhave, Sunil A. %T Electrostatic Transduction for MEMS Resonators %I EECS Department, University of California, Berkeley %D 2004 %F Bhave:8346