Synchronous Electron Beam Diagnostic for Plasma Etching Discharges

C.P. Chang and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M85/38
May 1985

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/ERL-85-38.pdf

BibTeX citation:

@techreport{Chang:M85/38,
    Author = {Chang, C.P. and Lieberman, Michael A.},
    Title = {Synchronous Electron Beam Diagnostic for Plasma Etching Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1985},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/504.html},
    Number = {UCB/ERL M85/38}
}

EndNote citation:

%0 Report
%A Chang, C.P.
%A Lieberman, Michael A.
%T Synchronous Electron Beam Diagnostic for Plasma Etching Discharges
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/38
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/504.html
%F Chang:M85/38