Axial Distribution of Optical Emission in a Planar Magnetron

L. Gu and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/6
January 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-6.pdf

BibTeX citation:

@techreport{Gu:M88/6,
    Author = {Gu, L. and Lieberman, Michael A.},
    Title = {Axial Distribution of Optical Emission in a Planar Magnetron},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/999.html},
    Number = {UCB/ERL M88/6}
}

EndNote citation:

%0 Report
%A Gu, L.
%A Lieberman, Michael A.
%T Axial Distribution of Optical Emission in a Planar Magnetron
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/6
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/999.html
%F Gu:M88/6