Electron Beam Probe Measurements of Electric Fields in RF Discharges

A.H. Sato and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/49
June 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-49.pdf

BibTeX citation:

@techreport{Sato:M90/49,
    Author = {Sato, A.H. and Lieberman, Michael A.},
    Title = {Electron Beam Probe Measurements of Electric Fields in RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html},
    Number = {UCB/ERL M90/49}
}

EndNote citation:

%0 Report
%A Sato, A.H.
%A Lieberman, Michael A.
%T Electron Beam Probe Measurements of Electric Fields in RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html
%F Sato:M90/49