Sheath Voltage Ratio for Asymmetric RF Discharges

M.V. Alves, Michael A. Lieberman, V. Vahedi and Charles K. (Ned) Birdsall

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/56
June 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-56.pdf

BibTeX citation:

@techreport{Alves:M90/56,
    Author = {Alves, M.V. and Lieberman, Michael A. and Vahedi, V. and Birdsall, Charles K. (Ned)},
    Title = {Sheath Voltage Ratio for Asymmetric RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html},
    Number = {UCB/ERL M90/56}
}

EndNote citation:

%0 Report
%A Alves, M.V.
%A Lieberman, Michael A.
%A Vahedi, V.
%A Birdsall, Charles K. (Ned)
%T Sheath Voltage Ratio for Asymmetric RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/56
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html
%F Alves:M90/56