V. Vahedi, Michael A. Lieberman, M.V. Alves, J.P. Verboncoeur and Charles K. (Ned) Birdsall
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/60
July 1990
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-60.pdf
BibTeX citation:
@techreport{Vahedi:M90/60, Author = {Vahedi, V. and Lieberman, Michael A. and Alves, M.V. and Verboncoeur, J.P. and Birdsall, Charles K. (Ned)}, Title = {A One Dimensional Collisional Model for Plasma Immersion Ion Implantation}, Institution = {EECS Department, University of California, Berkeley}, Year = {1990}, Month = {Jul}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html}, Number = {UCB/ERL M90/60} }
EndNote citation:
%0 Report %A Vahedi, V. %A Lieberman, Michael A. %A Alves, M.V. %A Verboncoeur, J.P. %A Birdsall, Charles K. (Ned) %T A One Dimensional Collisional Model for Plasma Immersion Ion Implantation %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/60 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html %F Vahedi:M90/60