D.A. Carl, D.W. Hess, Michael A. Lieberman, T.D. Nguyen and R. Gronsky
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/5
January 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-5.pdf
BibTeX citation:
@techreport{Carl:M91/5, Author = {Carl, D.A. and Hess, D.W. and Lieberman, Michael A. and Nguyen, T.D. and Gronsky, R.}, Title = {Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma}, Institution = {EECS Department, University of California, Berkeley}, Year = {1991}, Month = {Jan}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1679.html}, Number = {UCB/ERL M91/5} }
EndNote citation:
%0 Report %A Carl, D.A. %A Hess, D.W. %A Lieberman, Michael A. %A Nguyen, T.D. %A Gronsky, R. %T Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/5 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1679.html %F Carl:M91/5