Costas J. Spanos, R. Chen, S. Leang and N. Tam
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/8
January 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-8.pdf
BibTeX citation:
@techreport{Spanos:M91/8, Author = {Spanos, Costas J. and Chen, R. and Leang, S. and Tam, N.}, Title = {Special Issues in Semiconductor Manufacturing}, Institution = {EECS Department, University of California, Berkeley}, Year = {1991}, Month = {Jan}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1688.html}, Number = {UCB/ERL M91/8} }
EndNote citation:
%0 Report %A Spanos, Costas J. %A Chen, R. %A Leang, S. %A Tam, N. %T Special Issues in Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/8 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1688.html %F Spanos:M91/8