A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges

A.H. Sato and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/81
September 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-81.pdf

BibTeX citation:

@techreport{Sato:M91/81,
    Author = {Sato, A.H. and Lieberman, Michael A.},
    Title = {A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1991},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1813.html},
    Number = {UCB/ERL M91/81}
}

EndNote citation:

%0 Report
%A Sato, A.H.
%A Lieberman, Michael A.
%T A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/81
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1813.html
%F Sato:M91/81