V. Vahedi, R.A. Stewart and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/114
September 1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-114.pdf
BibTeX citation:
@techreport{Vahedi:M92/114, Author = {Vahedi, V. and Stewart, R.A. and Lieberman, Michael A.}, Title = {Analytic Model of the Ion Angular Distribution in a Collisional Sheath}, Institution = {EECS Department, University of California, Berkeley}, Year = {1992}, Month = {Sep}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2187.html}, Number = {UCB/ERL M92/114} }
EndNote citation:
%0 Report %A Vahedi, V. %A Stewart, R.A. %A Lieberman, Michael A. %T Analytic Model of the Ion Angular Distribution in a Collisional Sheath %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/114 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2187.html %F Vahedi:M92/114