Analytic Model of the Ion Angular Distribution in a Collisional Sheath

V. Vahedi, R.A. Stewart and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/114
September 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-114.pdf

BibTeX citation:

@techreport{Vahedi:M92/114,
    Author = {Vahedi, V. and Stewart, R.A. and Lieberman, Michael A.},
    Title = {Analytic Model of the Ion Angular Distribution in a Collisional Sheath},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2187.html},
    Number = {UCB/ERL M92/114}
}

EndNote citation:

%0 Report
%A Vahedi, V.
%A Stewart, R.A.
%A Lieberman, Michael A.
%T Analytic Model of the Ion Angular Distribution in a Collisional Sheath
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/114
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2187.html
%F Vahedi:M92/114