V. Vahedi, Charles K. (Ned) Birdsall, Michael A. Lieberman, G. DiPeso and T.D. Rognlien
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/146
December 1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-146.pdf
BibTeX citation:
@techreport{Vahedi:M92/146, Author = {Vahedi, V. and Birdsall, Charles K. (Ned) and Lieberman, Michael A. and DiPeso, G. and Rognlien, T.D.}, Title = {Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations}, Institution = {EECS Department, University of California, Berkeley}, Year = {1992}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2248.html}, Number = {UCB/ERL M92/146} }
EndNote citation:
%0 Report %A Vahedi, V. %A Birdsall, Charles K. (Ned) %A Lieberman, Michael A. %A DiPeso, G. %A Rognlien, T.D. %T Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/146 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2248.html %F Vahedi:M92/146