C. Lee and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M94/49

1994

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-49.pdf

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BibTeX citation:

@techreport{Lee:M94/49,
    Author= {Lee, C. and Lieberman, Michael A.},
    Title= {Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges},
    Year= {1994},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2582.html},
    Number= {UCB/ERL M94/49},
}

EndNote citation:

%0 Report
%A Lee, C. 
%A Lieberman, Michael A. 
%T Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2582.html
%F Lee:M94/49