Y. Wu and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/60
August 1995
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-60.pdf
BibTeX citation:
@techreport{Wu:M95/60, Author = {Wu, Y. and Lieberman, Michael A.}, Title = {Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing}, Institution = {EECS Department, University of California, Berkeley}, Year = {1995}, Month = {Aug}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2823.html}, Number = {UCB/ERL M95/60} }
EndNote citation:
%0 Report %A Wu, Y. %A Lieberman, Michael A. %T Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing %I EECS Department, University of California, Berkeley %D 1995 %@ UCB/ERL M95/60 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2823.html %F Wu:M95/60