Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing

Y. Wu and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/60
August 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-60.pdf

BibTeX citation:

@techreport{Wu:M95/60,
    Author = {Wu, Y. and Lieberman, Michael A.},
    Title = {Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2823.html},
    Number = {UCB/ERL M95/60}
}

EndNote citation:

%0 Report
%A Wu, Y.
%A Lieberman, Michael A.
%T Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/60
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2823.html
%F Wu:M95/60