Special Issues in Semiconductor Manufacturing

Costas J. Spanos, J. Chen, M. Cohn, M. Hatzilambrou, A. Miranda and R. Schenker

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/63
August 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-63.pdf

BibTeX citation:

@techreport{Spanos:M95/63,
    Author = {Spanos, Costas J. and Chen, J. and Cohn, M. and Hatzilambrou, M. and Miranda, A. and Schenker, R.},
    Title = {Special Issues in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2828.html},
    Number = {UCB/ERL M95/63}
}

EndNote citation:

%0 Report
%A Spanos, Costas J.
%A Chen, J.
%A Cohn, M.
%A Hatzilambrou, M.
%A Miranda, A.
%A Schenker, R.
%T Special Issues in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/63
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2828.html
%F Spanos:M95/63