Special Issues in Semiconductor Manufacturing

Costas J. Spanos, J. Chen, R. Chen, C. Fields, H. Huang, A. Ison, X. Niu, D. Park, J. Tao, M. Terrovitis and A. Wang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M95/64
August 1995

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/ERL-95-64.pdf

BibTeX citation:

@techreport{Spanos:M95/64,
    Author = {Spanos, Costas J. and Chen, J. and Chen, R. and Fields, C. and Huang, H. and Ison, A. and Niu, X. and Park, D. and Tao, J. and Terrovitis, M. and Wang, A.},
    Title = {Special Issues in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1995},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2834.html},
    Number = {UCB/ERL M95/64}
}

EndNote citation:

%0 Report
%A Spanos, Costas J.
%A Chen, J.
%A Chen, R.
%A Fields, C.
%A Huang, H.
%A Ison, A.
%A Niu, X.
%A Park, D.
%A Tao, J.
%A Terrovitis, M.
%A Wang, A.
%T Special Issues in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1995
%@ UCB/ERL M95/64
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1995/2834.html
%F Spanos:M95/64