G. Gregori and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M96/14

1996

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-14.pdf

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BibTeX citation:

@techreport{Gregori:M96/14,
    Author= {Gregori, G. and Lieberman, Michael A.},
    Title= {RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source},
    Year= {1996},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html},
    Number= {UCB/ERL M96/14},
}

EndNote citation:

%0 Report
%A Gregori, G. 
%A Lieberman, Michael A. 
%T RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/14
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/2983.html
%F Gregori:M96/14