Position Sensing for Electrostatic Micropositioners

Naiyavudhi Wongkomet

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M98/48
July 1998

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/ERL-98-48.pdf

Advisor: Bernhard E. Boser


BibTeX citation:

@phdthesis{Wongkomet:M98/48,
    Author = {Wongkomet, Naiyavudhi},
    Title = {Position Sensing for Electrostatic Micropositioners},
    School = {EECS Department, University of California, Berkeley},
    Year = {1998},
    Month = {Jul},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html},
    Number = {UCB/ERL M98/48}
}

EndNote citation:

%0 Thesis
%A Wongkomet, Naiyavudhi
%T Position Sensing for Electrostatic Micropositioners
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/48
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3481.html
%F Wongkomet:M98/48