E. Kawamura, V. Vahedi, Michael A. Lieberman and Charles K. (Ned) Birdsall
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M98/62
November 1998
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/ERL-98-62.pdf
BibTeX citation:
@techreport{Kawamura:M98/62, Author = {Kawamura, E. and Vahedi, V. and Lieberman, Michael A. and Birdsall, Charles K. (Ned)}, Title = {Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation}, Institution = {EECS Department, University of California, Berkeley}, Year = {1998}, Month = {Nov}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3522.html}, Number = {UCB/ERL M98/62} }
EndNote citation:
%0 Report %A Kawamura, E. %A Vahedi, V. %A Lieberman, Michael A. %A Birdsall, Charles K. (Ned) %T Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation %I EECS Department, University of California, Berkeley %D 1998 %@ UCB/ERL M98/62 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3522.html %F Kawamura:M98/62