Yashesh A. Shroff
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/32
2004
Advisor: William G. Oldham
BibTeX citation:
@phdthesis{Shroff:M04/32, Author = {Shroff, Yashesh A.}, Title = {Design, Fabrication, and Optical Analysis of Nanomirrors for Maskless EUV Lithography}, School = {EECS Department, University of California, Berkeley}, Year = {2004}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4242.html}, Number = {UCB/ERL M04/32} }
EndNote citation:
%0 Thesis %A Shroff, Yashesh A. %T Design, Fabrication, and Optical Analysis of Nanomirrors for Maskless EUV Lithography %I EECS Department, University of California, Berkeley %D 2004 %@ UCB/ERL M04/32 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4242.html %F Shroff:M04/32