Advanced MOSFET Designs and Implications for SRAM Scaling
Changhwan Shin
EECS Department, University of California, Berkeley
Technical Report No. UCB/EECS-2012-50
May 1, 2012
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2012/EECS-2012-50.pdf
Continued planar bulk MOSFET scaling is becoming increasingly difficult due to increased random variation in transistor performance with decreasing gate length, and thereby scaling of SRAM using minimum-size transistors is further challenging. This dissertation will discuss various advanced MOSFET designs and their benefits for extending density and voltage scaling of static memory (SRAM) arrays. Using three-dimensional (3-D) process and design simulations, transistor designs are optimized. Then, using an analytical compact model calibrated to the simulated transistor current-vs.-voltage characteristics, the performance and yield of six-transistor (6-T) SRAM cells are estimated. For a given cell area, fully depleted silicon-on-insulator (FD-SOI) MOSFET technology is projected to provide for significantly improved yield across a wide range of operating voltages, as compared with conventional planar bulk CMOS technology. Quasi-Planar (QP) bulk silicon MOSFETs are a lower-cost alternative and also can provide for improved SRAM yield. A more printable "notchless" QP bulk SRAM cell layout is proposed to reduce lithographic variations, and is projected to achieve six-sigma yield (required for terabit-scale SRAM arrays) with a minimum operating voltage below 1 Volt.
Advisors: Tsu-Jae King Liu
BibTeX citation:
@phdthesis{Shin:EECS-2012-50, Author= {Shin, Changhwan}, Editor= {King Liu, Tsu-Jae and Nikolic, Borivoje and Haller, Eugene}, Title= {Advanced MOSFET Designs and Implications for SRAM Scaling}, School= {EECS Department, University of California, Berkeley}, Year= {2012}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2012/EECS-2012-50.html}, Number= {UCB/EECS-2012-50}, Abstract= {Continued planar bulk MOSFET scaling is becoming increasingly difficult due to increased random variation in transistor performance with decreasing gate length, and thereby scaling of SRAM using minimum-size transistors is further challenging. This dissertation will discuss various advanced MOSFET designs and their benefits for extending density and voltage scaling of static memory (SRAM) arrays. Using three-dimensional (3-D) process and design simulations, transistor designs are optimized. Then, using an analytical compact model calibrated to the simulated transistor current-vs.-voltage characteristics, the performance and yield of six-transistor (6-T) SRAM cells are estimated. For a given cell area, fully depleted silicon-on-insulator (FD-SOI) MOSFET technology is projected to provide for significantly improved yield across a wide range of operating voltages, as compared with conventional planar bulk CMOS technology. Quasi-Planar (QP) bulk silicon MOSFETs are a lower-cost alternative and also can provide for improved SRAM yield. A more printable "notchless" QP bulk SRAM cell layout is proposed to reduce lithographic variations, and is projected to achieve six-sigma yield (required for terabit-scale SRAM arrays) with a minimum operating voltage below 1 Volt.}, }
EndNote citation:
%0 Thesis %A Shin, Changhwan %E King Liu, Tsu-Jae %E Nikolic, Borivoje %E Haller, Eugene %T Advanced MOSFET Designs and Implications for SRAM Scaling %I EECS Department, University of California, Berkeley %D 2012 %8 May 1 %@ UCB/EECS-2012-50 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2012/EECS-2012-50.html %F Shin:EECS-2012-50