Catalog Description: Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.

Units: 4

Related Areas:

• Physical Electronics (PHY)

Prerequisites: PHYSICS 7B

Formats:
Fall: 3 hours of lecture and 3 hours of laboratory per week
Spring: 3 hours of lecture and 3 hours of laboratory per week

Grading Basis: Student Option

Final Exam Status: Yes

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Class Schedule (Fall 2026):
EE 143 – TuTh 15:30-16:59, The Gateway Building B1022 – Grigory Tikhomirov

Class Notes
Phase 1 and 2 seats are open to EECS, ECE, and CS Majors. Remaining seats open to non-EECS COE during the adjustment period.

Non-COE Majors cannot enroll or waitlist.

Physics 7B or 5B,BL is an enforced prerequisite.

MANDATORY SAFETY TRAINING DURING THE FIRST TWO WEEKS - IF YOU MISS THE TRAINING YOU CANNOT TAKE THE COURSE

Class Schedule (Spring 2027):
EE 143 – TuTh 15:30-16:59, The Gateway Building B1022 – Ali Javey

Class Notes
ATTN: This course has an early add/drop deadline on the second Friday of the semester. Students who miss the mandatory safety training during the first two weeks will not be able to take this course.

Phase 1 and 2 seats are open to EECS, ECE, and CS Majors. Remaining seats open to non-EECS COE during the adjustment period. Students who are not in COE or CS are not permitted to take this course, even if seats become available in the adjustment period.

Physics 7B or 5B + 5BL is an enforced prerequisite.

Links:

• EECS Course Archives (CalNet authentication required)
• CS enrollment policies
• EE enrollment policies
• HKN course maps