Catalog Description: Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.

Units: 4

Related Areas:

• Physical Electronics (PHY)

Prerequisites: PHYSICS 7B

Formats:
Fall: 3 hours of lecture and 3 hours of laboratory per week
Spring: 3 hours of lecture and 3 hours of laboratory per week

Grading Basis: letter

Final Exam Status: Written final exam conducted during the scheduled final exam period

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Class Schedule (Spring 2025):
EE 143 – TuTh 14:00-15:29, Soda 306 – Grigory Tikhomirov

Class homepage on inst.eecs

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