Catalog Description: This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.

Units: 3

Also Offered As: ELENG 147

Related Areas:

• Micro/Nano Electro Mechanical Systems (MEMS)

Prerequisites: EECS 16A and EECS 16B.

Formats:
Spring: 3.0 hours of lecture and 1.0 hours of discussion per week
Fall: 3.0 hours of lecture and 1.0 hours of discussion per week

Grading Basis: Student Option

Final Exam Status: Yes

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