EE 147. Introduction to Microelectromechanical Systems (MEMS)

Catalog Description: This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.

Units: 3

Prerequisites: EECS 16A and EECS 16B.

Credit Restrictions: Students will receive no credit for El Eng 147 after taking El Eng 247A.

Formats:
Spring: 3.0 hours of lecture and 1.0 hours of discussion per week
Fall: 3.0 hours of lecture and 1.0 hours of discussion per week

Grading basis: letter

Final exam status: Written final exam conducted during the scheduled final exam period


Class Schedule (Fall 2022):
WeFr 11:00-12:29, Soda 306 – Prof. Kristofer PISTER, PhD, Xintian Liu

Fall 2019 class homepage on bCourses

Class homepage on inst.eecs

General Catalog listing

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