EE 147. Introduction to Microelectromechanical Systems (MEMS)
Catalog Description: This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.
Prerequisites: EECS 16A and EECS 16B.
Credit Restrictions: Students will receive no credit for El Eng 147 after taking El Eng 247A.
Spring: 3.0 hours of lecture and 1.0 hours of discussion per week
Fall: 3.0 hours of lecture and 1.0 hours of discussion per week
Grading basis: letter
Final exam status: Written final exam conducted during the scheduled final exam period