Catalog Description: The key processes for the fabrication of integrated circuits. Optical, X-ray, and e-beam lithography, ion implantation, oxidation and diffusion. Thin film deposition. Wet and dry etching and ion milling. Effect of phase and defect equilibria on process control.

Units: 3

Related Areas:

• Physical Electronics (PHY)

Prerequisites: EL ENG 143; and either EL ENG 140 or EL ENG 141.

Formats:
Fall: 3 hours of lecture per week
Spring: 3 hours of lecture per week

Grading Basis: letter

Final Exam Status: Written final exam conducted during the scheduled final exam period

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