EE 247A. Introduction to Microelectromechanical Systems (MEMS)

Catalog Description: This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.

Units: 3

Prerequisites: EECS 16A and EECS 16B; or consent of instructor required.

Credit Restrictions: Students will receive no credit for EE 247A after taking EE 147.

Fall: 3.0 hours of lecture and 1.0 hours of discussion per week
Spring: 3.0 hours of lecture and 1.0 hours of discussion per week

Grading basis: letter

Final exam status: No final exam

Class Schedule (Fall 2023):
EE 147/247A – TuTh 17:00-18:29, Social Sciences Building 170 – Ming-Chiang A Wu
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Class homepage on inst.eecs

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