Catalog Description: Parametric design and optimal design of MEMS. Emphasis on design, not fabrication. Analytic solution of MEMS design problems to determine the dimensions of MEMS structures for specified function. Trade-off of various performance requirements despite conflicting design requirements. Structures include flexure systems, accelerometers, and rate sensors.

Units: 3

Also Offered As: MECENG C219, ELENG C246

Related Areas:

• Micro/Nano Electro Mechanical Systems (MEMS)
• Physical Electronics (PHY)

Prerequisites: Graduate standing or consent of instructor.

Formats:
Spring: 3 hours of lecture per week
Fall: 3 hours of lecture per week

Grading Basis: Student Option

Final Exam Status: No

---

Links:

• EECS Course Archives (CalNet authentication required)
• CS enrollment policies
• EE enrollment policies
• HKN course maps