Catalog Description: Parametric design and optimal design of MEMS. Emphasis on design, not fabrication. Analytic solution of MEMS design problems to determine the dimensions of MEMS structures for specified function. Trade-off of various performance requirements despite conflicting design requirements. Structures include flexure systems, accelerometers, and rate sensors.

Units: 3

Prerequisites: Graduate standing or consent of instructor.

Formats:
Spring: 3 hours of lecture per week
Fall: 3 hours of lecture per week

Grading basis: letter

Final exam status: No final exam

Also listed as: MEC ENG C219

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Class homepage on inst.eecs

Related Areas:

• Micro/Nano Electro Mechanical Systems (MEMS)
• Physical Electronics (PHY)