EE C246. Parametric and Optimal Design of MEMS
Catalog Description: Parametric design and optimal design of MEMS. Emphasis on design, not fabrication. Analytic solution of MEMS design problems to determine the dimensions of MEMS structures for specified function. Trade-off of various performance requirements despite conflicting design requirements. Structures include flexure systems, accelerometers, and rate sensors.
Prerequisites: Graduate standing or consent of instructor.
Spring: 3 hours of lecture per week
Fall: 3 hours of lecture per week
Grading basis: letter
Final exam status: No final exam
Also listed as: MEC ENG C219