Catalog Description: Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required.

Units: 4

Also Offered As: MECENG C218, ELENG C247B

Prerequisites: Graduate standing in engineering or science; undergraduates with consent of instructor.

Formats:
Spring: 3 hours of lecture and 1 hour of discussion per week
Fall: 3 hours of lecture and 1 hour of discussion per week

Grading Basis: Student Option

Final Exam Status: Yes

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Class Schedule (Spring 2026):
EE C247B – WeFr 15:30-16:59, Cory 293 – Yuan Cao

Class Schedule (Fall 2026):
EE C247B – TuTh 15:30-16:59, Cory 521 – Ming-Chiang A Wu

Links:

• EECS Course Archives (CalNet authentication required)
• CS enrollment policies
• EE enrollment policies
• HKN course maps