Catalog Description: Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required.

Units: 4

Also Offered As: MEC ENG C218

Prerequisites: Graduate standing in engineering or science; undergraduates with consent of instructor.

Formats:
Spring: 3 hours of lecture and 1 hour of discussion per week
Fall: 3 hours of lecture and 1 hour of discussion per week

Grading Basis: letter

Final Exam Status: Written final exam conducted during the scheduled final exam period

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Class Schedule (Spring 2025):
EE C247B – MoWe 09:30-10:59, Cory 293 – Jeronimo Segovia Fernandez
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